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MEMS

MEMS fundamental technology and applications / [electronic resource] : editors, Vikas Choudhary, Krzysztof Iniewski. - Boca Raton : Taylor & Francis, 2013. - xxii, 456 p. : ill. - Devices, circuits, and systems .

Includes bibliographical references and index.

ISBN: 9781466515826 (ebook : PDF)

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectronic packaging.

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