Mechanics of microelectronics /
Zhang, G. Q.
Mechanics of microelectronics / by G.Q. Zhang, W.D. van Driel and X.J. Fan. - Dordrecht : Springer, c2006. - xiii, 563 p. : ill. ; 25 cm. - Solid mechanics and its applications ; v. 141 .
Includes bibliographical references.
140204934X (hd. bd.) 9781402049347 (hd. bd.) 1402049358 (ebook) 9781402049354 (ebook)
2007451142
Microelectronics.
Mechanical engineering.
621.381 / ZHM
Mechanics of microelectronics / by G.Q. Zhang, W.D. van Driel and X.J. Fan. - Dordrecht : Springer, c2006. - xiii, 563 p. : ill. ; 25 cm. - Solid mechanics and its applications ; v. 141 .
Includes bibliographical references.
140204934X (hd. bd.) 9781402049347 (hd. bd.) 1402049358 (ebook) 9781402049354 (ebook)
2007451142
Microelectronics.
Mechanical engineering.
621.381 / ZHM