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Resonant MEMS :

Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse. - Wiesbaden : Wiley-VCH Verlag & Co. KGaA, [2015] - 1 online resource : illustrations. - Advanced micro and nanosystems . - Advanced micro & nanosystems. .

Includes bibliographical references and index.

ISBN: 9783527676361 3527676368 9783527676354 352767635X 9783527676347 3527676341 9783527676330 3527676333 3527335455 9783527335459

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Microfabrication.
Resonance.
TECHNOLOGY & ENGINEERING / Electronics / Digital
TECHNOLOGY & ENGINEERING / Electronics / General
TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
Microelectromechanical systems--Design and construction.
Microfabrication.
Resonance.

Index Terms--Genre/Form:
Electronic books.
Electronic books.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

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