Nanofabrication :
Papadopoulos, Christo,
Nanofabrication : principles and applications / Christo Papadopoulos. - Switzerland : Springer 2016 - vi, 81 p. : illustrations ; 24 cm. - SpringerBriefs in materials, 2192-1091 . - SpringerBriefs in materials. .
Includes bibliographical references.
Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time;
Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
Materials science.
Nanolithography.
TECHNOLOGY & ENGINEERING--Mechanical.
Nanolithography.
Technology & Engineering--Electronics--General.
Technology & Engineering--Electronics--Semiconductors.
Science--Nanostructures.
Electronics engineering.
Semi-conductors & super-conductors.
Nanotechnology.
Nanotechnology.
Electronics.
Technology & Engineering--Nanotechnology & MEMS.
Electronic books.
621.381 / PAN
Nanofabrication : principles and applications / Christo Papadopoulos. - Switzerland : Springer 2016 - vi, 81 p. : illustrations ; 24 cm. - SpringerBriefs in materials, 2192-1091 . - SpringerBriefs in materials. .
Includes bibliographical references.
Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time;
Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
Materials science.
Nanolithography.
TECHNOLOGY & ENGINEERING--Mechanical.
Nanolithography.
Technology & Engineering--Electronics--General.
Technology & Engineering--Electronics--Semiconductors.
Science--Nanostructures.
Electronics engineering.
Semi-conductors & super-conductors.
Nanotechnology.
Nanotechnology.
Electronics.
Technology & Engineering--Nanotechnology & MEMS.
Electronic books.
621.381 / PAN