Micro/nano replication : processes and applications / Shinill Kang.

Includes index.

Includes bibliographical references and index.

MICRO/NANO REPLICATION: Processes and Applications; CONTENTS; Preface; 1. Introduction; 1.1 Introduction; 1.2 Micro/Nano Replication; 1.3 Application Fields of Micro/Nano Replicated Parts; 1.3.1 Optical Data Storage Devices; 1.3.2 Display Fields; 1.3.3 Other Industries; 1.4 Required Technologies for Micro/Nano Replication; References; 2. Patterning Technology for Micro/Nanomold Fabrication; 2.1 Material Removal Process; 2.1.1 Mechanical Machining; 2.1.2 Laser Ablation; 2.1.3 Silicon Etching Process; 2.1.4 Focused Ion Beam Patterning; 2.2 Lithography Process; 2.2.1 Electron Beam Lithography.

2.2.2 Photolithography2.2.3 Reflow Method; 2.2.3.1 Fabrication of a Mother Lens; 2.2.3.2 Empirical Equation for the Volume Change Ratio of a Reflow Lens; 2.2.3.3 Verification of the Model; 2.2.4 Laser Interference Lithography; 2.2.4.1 Theory of Laser Interference Lithography; 2.2.4.2 Simulation of Laser Interference Lithography; 2.2.4.3 Experimental Setup; 2.2.4.4 Fabrication of Nanostructures Using Laser Interference Lithography under Different Process Conditions; 2.3 Electroforming Processes; 2.3.1 Theory of Electroforming Process; 2.3.2 Electroforming Results.

2.3.2.1 Metallic Mold for a Microlens Array2.3.2.2 Metallic Mold for Patterned Media; References; 3. Modification of Mold Surface Properties; 3.1 Introduction; 3.2 Thiol-Based Self-Assembled Monolayer; 3.2.1 Thiol-Based Self-Assembled Monolayer and Deposition Process; 3.2.2 Experiment Results and Analysis; 3.2.3 The Changing Properties of SAM at Actual Replication Environment; 3.2.4 Analysis of Replicated Polymeric Patterns; 3.3 Silane-Based Self-Assembled Monolayer; 3.3.1 Silane-Based Self-Assembled Monolayer; 3.3.2 Deposition Process of Silane-Based Self-Assembled Monolayer.

3.3.3 Self-Assembled Monolayer on Polymer Mold3.3.4 Analysis of Replicated Polymeric Patterns; 3.4 Dimethyldichlorosilane Self-Assembled Monolayer; References; 4. Micro/Nanoinjection Molding with an Intelligent Mold System; 4.1 Introduction; 4.2 Effects of the Mold Surface Temperature on Micro/Nanoinjection Molding; 4.3 Theoretical Analysis of Passive/Active Heating Methods for Controlling the Mold Surface Temperature; 4.3.1 Mathematical Modeling and Simulation; 4.3.2 Passive Heating; 4.3.3 Active Heating.

4.4 Fabrication and Control of an Active Heating System Using an MEMS Heater and an RTD Sensor4.4.1 Construction of an Intelligent Mold System; 4.4.2 Control System for the Intelligent Mold System; 4.4.2.1 Kalman Filter Observer of the Thermal Plant; 4.4.2.2 LQGI Controller; 4.4.2.3 Performance of the Constructed Control System; 4.5 Replication of a High-Density Optical Disc Substrate Using the Intelligent Mold System; References; 5. Hot Embossing of Microstructured Surfaces and Thermal Nanoimprinting; 5.1 Introduction; 5.2 Development of Microcompression Molding Process.

This book is an introduction to the fundamentals and processes for micro and nano molding for plastic components. In addition to the basics, the book covers applications details and examples. The book helps both students and professionals to understand and work with the growing tools of molding and uses for micro and nano-sized plastic parts. Provides a comprehensive presentation on fundamentals and practices of manufacturing for micro / nano sized plastics partsCovers a relatively new but fast-growing field that is impacting any industry using plastic parts in their products (electronics, tele.