Microlithography : process technology for IC fabrication / David J. Elliott.
Material type: TextPublication details: New York : McGraw-Hill, c1986.Description: xix, 378 p. : ill. ; 24 cmISBN:- 0070193045 :
- 621.38173 22
Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | Central Library, SUST General Stacks | 621.38173 ELM (Browse shelf(Opens below)) | 1 | Available | 0002077 | |
Books | Central Library, SUST General Stacks | 621.38173 ELM (Browse shelf(Opens below)) | 2 | Available | 0002076 | |
Books | Central Library, SUST General Stacks | 621.38173 ELM (Browse shelf(Opens below)) | 3 | Available | 0002078 | |
Books | Central Library, SUST General Stacks | 621.38173 ELM (Browse shelf(Opens below)) | 4 | Available | 0002074 | |
Books | Central Library, SUST General Stacks | 621.38173 ELM (Browse shelf(Opens below)) | 5 | Available | 0002075 |
Includes bibliographies and index.
There are no comments on this title.