TY  - BOOK
AU  - Campbell Stephen A.
TI  - The science and engineering of microelectronic fabrication
SN  - 0195136055
U1  - 22 621.3815
PY  - 2001///
CY  - New York
PB  - Oxford university press
KW  - Semiconductor-design and construction
N1  - Includes index; Including bibliographical reference and Index
ER  -