TY  - BOOK
AU  - Ghandhi, Sorab K
AU  - 
TI  - VLSI Febrication principles technology: Silicon and Gallium Arsenide 
SN  - 9788126517909
U1  - 621.3815 22
PY  - 1994///
CY  - India
PB  - Wiley
KW  - Integrated circuits
N1  - Includes bibliographical reference and index
ER  -