TY - BOOK AU - Lawes,Ronald A. TI - MEMS cost analysis: from laboratory to industry SN - 9789814411073 (ebook : PDF) KW - Microelectromechanical systems KW - Costs KW - Microelectromechanical systems industry N1 - Includes bibliographical references and index UR - http://marc.crcnetbase.com/isbn/9789814411073 ER -