TY  - BOOK
AU  - Choudhary,Vikas
AU  - Iniewski,Krzysztof
TI  - MEMS: fundamental technology and applications 
T2  - Devices, circuits, and systems
SN  - 9781466515826 (ebook : PDF)
PY  - 2013///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references and index
UR  - http://marc.crcnetbase.com/isbn/9781466515826
ER  -