TY  - BOOK
AU  - Delchar,T.A.
TI  - Vacuum physics and techniques
SN  - 0412465906 (alk. paper)
U1  - 533.5 22
PY  - 1993///
CY  - London, New York
PB  - Chapman & Hall
KW  - Vacuum
KW  - Vacuum technology
N1  - Includes bibliographical references (p. [246]-247) and index
UR  - http://www.loc.gov/catdir/enhancements/fy0822/92021136-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0822/92021136-t.html
ER  -