TY  - BOOK
AU  - May,Gary S.
AU  - Spanos,Costas J.
TI  - Fundamentals of semiconductor manufacturing and process control
SN  - 0471784060 (cloth : alk. paper)
U1  - 621.38152 22
PY  - 2006///
CY  - [Piscataway], Hoboken, N.J.
PB  - IEEE, Wiley-Interscience
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
KW  - Process control
KW  - Statistical methods
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip061/2005028448.html
UR  - http://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html
ER  -