TY  - BOOK
AU  - Garrou,Philip E.
AU  - Koyanagi,Mitsumasa
AU  - Ramm,Peter
TI  - Handbook of 3D Integration: 3D process technology 
SN  - 9783527670109
AV  - TK7874.893 
U1  - 621.3815 23
PY  - 2014///
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Three-dimensional integrated circuits
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Three-dimensional imaging
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - http://onlinelibrary.wiley.com/book/10.1002/9783527670109
ER  -