TY  - BOOK
AU  - Brand,Oliver
AU  - Dufour,Isabelle
AU  - Heinrich,Stephen M.
AU  - Josse,Fabien
TI  - Resonant MEMS: fundamentals, implementation and application 
T2  - Advanced micro and nanosystems
SN  - 9783527676361
AV  - TK7875 
U1  - 621.381 23
PY  - 2015///]
CY  - Wiesbaden
PB  - Wiley-VCH Verlag & Co. KGaA
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Microfabrication
KW  - Resonance
KW  - TECHNOLOGY & ENGINEERING / Electronics / Digital
KW  - bisacsh
KW  - TECHNOLOGY & ENGINEERING / Electronics / General
KW  - TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
KW  - fast
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - http://onlinelibrary.wiley.com/book/10.1002/9783527676330
ER  -