TY  - BOOK
AU  - Elliott,David J.
TI  - Microlithography: process technology for IC fabrication 
SN  - 0070193045 :
U1  - 621.38173 22
PY  - 1986///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Microlithography
KW  - Photoresists
N1  - Includes bibliographies and index
ER  -