TY  - SER
ED  - Society of Photo-optical Instrumentation Engineers.
TI  - Microlithography world
AV  - TK7871.85 .M519
PY  - 1992///]-2008
CY  - Port Washington, N.Y.
PB  - Penn Well Publication, published in cooperation with SPIE
KW  - Semiconductors
KW  - Design and construction
KW  - Periodicals
KW  - Microlithography
KW  - Masks (Electronics)
KW  - fast
KW  - Microlithografie
KW  - gtt
N1  - Title from cover; Published: Tulsa, OK, Oct., Nov., Dec. 1993-
UR  - https://search.ebscohost.com/direct.asp?db=aph&jid=9CK&scope=site
ER  -