TY  - BOOK
AU  - Lee,Hong H.
TI  - Fundamentals of microelectronics processing
SN  - 0071007962
U1  - 621.3815 22
PY  - 1990///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Design and construction
KW  - Materials
ER  -