TY  - BOOK
AU  - Elliott,J.David
TI  - Intergrated circuit fabrication technology
SN  - 0071007369
U1  - 621.38173 22
PY  - 1989///
CY  - New Delhi
PB  - McGraw-Hill Pub co
KW  - Integrated circuits -- Design and construction
KW  - Integrated Schaltung
N1  - Includes bibliographies references and index
ER  -