TY  - BOOK
AU  - Zhang,G.Q.
AU  - Driel,W.D.van
AU  - Fan,X.J.
TI  - Mechanics of microelectronics
SN  - 140204934X (hd. bd.)
U1  - 621.381 22
PY  - 2006///
CY  - Dordrecht
PB  - Springer
KW  - Microelectronics
KW  - Mechanical engineering
N1  - Includes bibliographical references
ER  -