| 000 | 00726nam a2200229 a 4500 | ||
|---|---|---|---|
| 001 | sulb63794 | ||
| 003 | BD-SySUS | ||
| 005 | 20141202140801.0 | ||
| 008 | 130219s1984 caua 001 0 eng d | ||
| 020 | _a0195136055 | ||
| 040 |
_aDLC _cDLC _dDLC _dBD-SySUS |
||
| 082 |
_2621.3815 _a22 |
||
| 100 | 1 |
_aCampbell Stephen A. _99635 |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _c Campbell Stephen A. |
| 250 | _a2nd ed. | ||
| 260 |
_aNew York : _bOxford university press, _cc2001. |
||
| 300 |
_axiv, 603 p. : _bill. ; _c24 cm. |
||
| 500 | _aIncludes index. | ||
| 504 | _aIncluding bibliographical reference and Index | ||
| 650 | 0 |
_aSemiconductor-design and construction _99636 |
|
| 942 |
_2ddc _cBK |
||
| 999 |
_c19824 _d19824 |
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