000 00687nam a2200229 a 4500
001 sulb664673
003 BD-SySUS
005 20141204152015.0
008 130321s1988 nyua b 001 0 eng d
020 _a9788126517909
040 _aDLC
_cDLC
_dDLC
_dBD-SySUS
082 0 0 _a621.3815
_222
100 _aGhandhi, Sorab K
_99876
245 0 0 _aVLSI Febrication principles technology :
_bSilicon and Gallium Arsenide /
_cSorab K Ghandhi.
250 _a2nd ed.
260 _aIndia :
_bWiley,
_cc1994.
300 _axxiv, 834 p. :
_bill. ;
_c25 cm.
504 _aIncludes bibliographical reference and index.
650 0 _aIntegrated circuits.
_99877
700 1 _99878
942 _2ddc
_cBK
999 _c19876
_d19876