| 000 | 00826pam a2200205 a 4500 | ||
|---|---|---|---|
| 001 | sulb-eb0003651 | ||
| 008 | 130725s2013 fluad sb 001 0 eng d | ||
| 020 | _a9781466515826 (ebook : PDF) | ||
| 040 |
_aFlBoTFG _cFlBoTFG _dBD-SySUS |
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| 245 | 0 | 0 |
_aMEMS _h[electronic resource] : _bfundamental technology and applications / _ceditors, Vikas Choudhary, Krzysztof Iniewski. |
| 260 |
_aBoca Raton : _bTaylor & Francis, _c2013. |
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| 300 |
_axxii, 456 p. : _bill. |
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| 490 | 1 | _aDevices, circuits, and systems | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicroelectronic packaging. | |
| 700 | 1 | _aChoudhary, Vikas. | |
| 700 | 1 | _aIniewski, Krzysztof. | |
| 856 | 4 | 0 |
_uhttp://marc.crcnetbase.com/isbn/9781466515826 _qapplication/PDF _zRead Online / DOWNLOAD. |
| 999 |
_c23992 _d23992 |
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