000 02052nam a22003257a 4500
001 sulb-eb0016318
003 BD-SySUS
005 20160405135333.0
008 101011s2011||||enk o ||1 0|eng|d
020 _a9780511974342 (ebook)
020 _z9780521763004 (hardback)
040 _aUkCbUP
_beng
_erda
_cUkCbUP
_dBD-SySUS
050 0 0 _aTA2020
_b.C43 2011
082 0 0 _a621.044
_222
100 1 _aChabert, Pascal,
_eauthor.
245 1 0 _aPhysics of Radio-Frequency Plasmas /
_cPascal Chabert, Nicholas Braithwaite.
264 1 _aCambridge :
_bCambridge University Press,
_c2011.
300 _a1 online resource (394 pages) :
_bdigital, PDF file(s).
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
500 _aTitle from publisher's bibliographic system (viewed on 04 Apr 2016).
520 _aLow-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
650 0 _aLow temperature plasmas
650 0 _aRadio frequency
700 1 _aBraithwaite, Nicholas,
_eauthor.
776 0 8 _iPrint version:
_z9780521763004
856 4 0 _uhttp://dx.doi.org/10.1017/CBO9780511974342
942 _2Dewey Decimal Classification
_ceBooks
999 _c37756
_d37756