| 000 | 01270nam a22002897a 4500 | ||
|---|---|---|---|
| 001 | sulbI000154 | ||
| 003 | BD-SySUS | ||
| 005 | 20160525100547.0 | ||
| 008 | 160525s2006 njua b 001 0 eng d | ||
| 020 | _a0471784060 (cloth : alk. paper) | ||
| 020 | _a9780471784067 | ||
| 040 |
_aDLC _cDLC _dUKM _dBAKER _dC#P _dCOO _dDLC _dBD-SySUS |
||
| 082 | 0 | 0 |
_a621.38152 _222 _bMAF |
| 100 | 1 |
_aMay, Gary S. _925721 |
|
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May, Costas J. Spanos. |
| 260 |
_a[Piscataway] : _bIEEE ; _aHoboken, N.J. : _bWiley-Interscience, _cc2006. |
||
| 300 |
_axix, 463 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _915509 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _915508 |
|
| 650 | 0 |
_aProcess control _xStatistical methods. _911544 |
|
| 700 | 1 |
_aSpanos, Costas J. _925722 |
|
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/ecip061/2005028448.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html |
| 942 |
_2ddc _cBK |
||
| 999 |
_c61048 _d61048 |
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