000 01841cam a2200493Ki 4500
001 sulb-eb0033460
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005 20170713221407.0
006 m o d
007 cr cnu|||unuuu
008 140813s2014 gw obf 001 0 eng d
040 _aDG1
_beng
_erda
_epn
_cDG1
_dYDXCP
_dOCLCQ
_dDEBBG
_dBD-SySUS
019 _a900562790
020 _a9783527670109
_q(electronic bk.)
020 _a3527670106
_q(electronic bk.)
024 7 _a10.1002/9783527670109
_2doi
029 1 _aCHBIS
_b010442130
029 1 _aCHVBK
_b334083966
029 1 _aGBVCP
_b799862703
029 1 _aNZ1
_b15753508
029 1 _aNZ1
_b15907019
029 1 _aDEBBG
_bBV043397040
035 _a(OCoLC)886656913
_z(OCoLC)900562790
050 4 _aTK7874.893
082 0 4 _a621.3815
_223
049 _aMAIN
245 0 0 _aHandbook of 3D Integration :
_b3D process technology /
_cedited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm.
264 1 _aWeinheim, Germany :
_bWiley-VCH,
_c2014.
300 _a1 online resource
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
504 _aIncludes bibliographical references and index.
588 0 _aOnline resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014).
650 0 _aThree-dimensional integrated circuits
_xDesign and construction
_vHandbooks, manuals, etc.
650 0 _aThree-dimensional imaging
_vHandbooks, manuals, etc.
655 4 _aElectronic books.
700 1 _aGarrou, Philip E.,
_eeditor.
700 1 _aKoyanagi, Mitsumasa,
_eeditor.
700 1 _aRamm, Peter,
_eeditor.
856 4 0 _uhttp://onlinelibrary.wiley.com/book/10.1002/9783527670109
_zWiley Online Library [Free Download only for SUST IP]
938 _aYBP Library Services
_bYANK
_n10706479
994 _a92
_bDG1
999 _c65112
_d65112