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_aResonant MEMS : _bfundamentals, implementation and application / _cedited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse. |
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_aWiesbaden : _bWiley-VCH Verlag & Co. KGaA, _c[2015] |
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| 490 | 1 | _aAdvanced micro and nanosystems | |
| 588 | 0 | _aOnline resource; title from PDF title page (Ebsco, viewed May 11, 2015). | |
| 504 | _aIncludes bibliographical references and index. | ||
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_aMicroelectromechanical systems _xDesign and construction. |
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| 650 | 0 | _aMicrofabrication. | |
| 650 | 0 | _aResonance. | |
| 650 | 7 |
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_aMicroelectromechanical systems _xDesign and construction. _2fast _0(OCoLC)fst01019747 |
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_aResonance. _2fast _0(OCoLC)fst01095610 |
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_aBrand, Oliver, _d1964- _eeditor. |
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_aDufour, Isabelle _c(Electrical engineer), _eeditor. |
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_aHeinrich, Stephen M., _eeditor. |
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_iPrint version: _tResonant MEMS : fundamentals, implementation and application. _dWeinheim, Baden-Württemberg, Germany : Wiley-VCH, c2015 _hxxv, 483 pages _kAdvanced micro & nanosystems. _z9783527335459 |
| 830 | 0 | _aAdvanced micro & nanosystems. | |
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