| 000 | 00665nam a2200193 a 4500 | ||
|---|---|---|---|
| 001 | sulb2077 | ||
| 008 | 130317s1986 nyua b 001 0 eng d | ||
| 020 |
_a0070193045 : _c$42.00 |
||
| 040 |
_aDLC _cDLC _dDLC _dBD-SySUS |
||
| 082 | 0 | 0 |
_a621.38173 _222 |
| 100 | 1 | _aElliott, David J. | |
| 245 | 1 | 0 |
_aMicrolithography : _bprocess technology for IC fabrication / _cDavid J. Elliott. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc1986. |
||
| 300 |
_axix, 378 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographies and index. | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction. |
|
| 650 | 0 | _aMicrolithography. | |
| 650 | 0 | _aPhotoresists. | |
| 999 |
_c7082 _d7082 |
||