| 000 | 00443nam a22001697a 4500 | ||
|---|---|---|---|
| 001 | sulb0072166 | ||
| 003 | BD-SySUS | ||
| 005 | 20190926124811.0 | ||
| 008 | 190926s2018 nyu 000 0 engd | ||
| 020 | _a9783319918952 | ||
| 040 |
_aDLC _beng _erda _cDLC _dBD-SySUS |
||
| 082 |
_222 _a620.115 _bSEM |
||
| 245 | 0 | 0 | _aSemiconductor nanotechnology. |
| 260 |
_aSingapore _bSpringer _c2018 |
||
| 300 |
_ax, 236p. _bill. ; _c24 cm. |
||
| 942 |
_2ddc _cBK |
||
| 999 |
_c74242 _d74242 |
||