000 00907nam a22002537a 4500
001 0072135
003 BD-SySUS
005 20190929091519.0
008 190929s2016 nyua b 001 0 engd
020 _a9783319393599
040 _aDLC
_beng
_cDLC
_erda
_dDLC
_dBD-SySUS
082 _222
_a620.5
_bCUN
100 1 _aCui Zheng
_932194
245 0 0 _aNanofabrication.
260 _aNew York :
_bSpringer
_c2016
300 _axvii,432 p. :
504 _aIncludes bibliography and index
650 _aNanotechnology
_932195
650 _aNanomanufacturing
_932196
856 4 2 _3Contributor biographical information
_uhttps://www.loc.gov/catdir/enhancements/fy1620/2016943135-b.html
856 4 2 _3Publisher description
_uhttps://www.loc.gov/catdir/enhancements/fy1620/2016943135-d.html
856 4 1 _3Table of contents only
_uhttps://www.loc.gov/catdir/enhancements/fy1620/2016943135-t.html
942 _2ddc
_cBK
999 _c74244
_d74244