| 000 | 01791cas a22004092a 4500 | ||
|---|---|---|---|
| 001 | ebs576775e | ||
| 003 | BD-SySUS | ||
| 006 | m d |||||| | ||
| 007 | cr|unu|||||||| | ||
| 008 | 931011d19922008okuqr p o 0 a0eng c | ||
| 022 | _y1074-407X | ||
| 035 | _a(BD-SySUS)ebs576775e | ||
| 040 |
_aIXA _beng _dBD-SySUS |
||
| 042 | _apcc nsdp | ||
| 050 | 0 | 0 |
_aTK7871.85 _b.M519 |
| 130 | 0 |
_aMicrolithography world (Online) _946812 |
|
| 222 | 1 | 0 | _aMicrolithography world |
| 245 | 0 | 0 |
_aMicrolithography world _h[electronic resource]. |
| 260 |
_aPort Washington, N.Y. : _bPenn Well Publication, published in cooperation with SPIE, _c[1992]-2008. |
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| 310 |
_aQuarterly, _bJan./Feb./Mar. 1993- |
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| 362 | 0 | _aVol. 1, no. 1 (Mar./Apr. 1992)- | |
| 362 | 1 | _aCeased with v. 17, no. 4 (Nov. 2008). | |
| 500 | _aTitle from cover. | ||
| 500 | _aPublished: Tulsa, OK, Oct., Nov., Dec. 1993- | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vPeriodicals. _946813 |
|
| 650 | 0 |
_aMicrolithography _vPeriodicals. _946814 |
|
| 650 | 0 |
_aMasks (Electronics) _vPeriodicals. _946815 |
|
| 650 | 7 |
_aMasks (Electronics) _2fast _0(OCoLC)fst01011095 _946816 |
|
| 650 | 7 |
_aMicrolithography. _2fast _0(OCoLC)fst01019883 _946817 |
|
| 650 | 7 |
_aSemiconductors _xDesign and construction. _2fast _0(OCoLC)fst01112213 _915509 |
|
| 650 | 1 | 7 |
_aMicrolithografie. _2gtt _946818 |
| 655 | 7 |
_aPeriodicals. _2fast _0(OCoLC)fst01411641 |
|
| 710 | 2 |
_aSociety of Photo-optical Instrumentation Engineers. _915592 |
|
| 773 | 0 |
_tAcademic Search Premier _dEBSCO |
|
| 776 | 1 |
_tMicrolithography world _x1074-407X _w(OCoLC)28982886 _w(DLC)93659127 |
|
| 856 | 4 | 0 |
_3Full text available in SUST IP's: May 2003-Nov 2008. _zAvailable in EBSCO Host Academic Search Premier. _uhttps://search.ebscohost.com/direct.asp?db=aph&jid=9CK&scope=site |
| 999 |
_c79181 _d79181 |
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