000 | 00533nam a2200169 a 4500 | ||
---|---|---|---|
001 | sulb5568 | ||
008 | 130321s1990 nyua b 001 0 eng d | ||
020 | _a0071007962 | ||
040 |
_aDLC _cDLC _dDLC _dBD-SySUS |
||
082 | 0 | 0 |
_a621.3815 _222 |
100 | 1 | _aLee, Hong H. | |
245 | 1 | 0 |
_aFundamentals of microelectronics processing / _cHong H. Lee. |
260 |
_aNew York : _bMcGraw-Hill, _cc1990. |
||
300 |
_axvi, 514 p. : _bill. ; _c25 cm. |
||
650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
650 | 0 |
_aIntegrated circuits _xMaterials. |
|
999 |
_c8805 _d8805 |