000 00533nam a2200169 a 4500
001 sulb5568
008 130321s1990 nyua b 001 0 eng d
020 _a0071007962
040 _aDLC
_cDLC
_dDLC
_dBD-SySUS
082 0 0 _a621.3815
_222
100 1 _aLee, Hong H.
245 1 0 _aFundamentals of microelectronics processing /
_cHong H. Lee.
260 _aNew York :
_bMcGraw-Hill,
_cc1990.
300 _axvi, 514 p. :
_bill. ;
_c25 cm.
650 0 _aIntegrated circuits
_xDesign and construction.
650 0 _aIntegrated circuits
_xMaterials.
999 _c8805
_d8805