The science and engineering of microelectronic fabrication /
Campbell Stephen A.
The science and engineering of microelectronic fabrication / Campbell Stephen A. - 2nd ed. - New York : Oxford university press, c2001. - xiv, 603 p. : ill. ; 24 cm.
Includes index.
Including bibliographical reference and Index
0195136055
Semiconductor-design and construction
22
The science and engineering of microelectronic fabrication / Campbell Stephen A. - 2nd ed. - New York : Oxford university press, c2001. - xiv, 603 p. : ill. ; 24 cm.
Includes index.
Including bibliographical reference and Index
0195136055
Semiconductor-design and construction
22