The science and engineering of microelectronic fabrication / (Record no. 19824)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00726nam a2200229 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | sulb63794 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | BD-SySUS |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20141202140801.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 130219s1984 caua 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0195136055 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | DLC |
| Modifying agency | DLC |
| -- | BD-SySUS |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Edition number | 621.3815 |
| Classification number | 22 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell Stephen A. |
| 9 (RLIN) | 9635 |
| 245 14 - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication / |
| Statement of responsibility, etc. | Campbell Stephen A. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Oxford university press, |
| Date of publication, distribution, etc. | c2001. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 603 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 500 ## - GENERAL NOTE | |
| General note | Includes index. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Including bibliographical reference and Index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductor-design and construction |
| 9 (RLIN) | 9636 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Date last checked out | Copy number | Price effective from |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 23/11/2014 | 2 | 621.3815 CAS | 0063794 | 06/05/2019 | 28/04/2019 | 1 | 23/11/2014 | ||||
| Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 23/11/2014 | 621.3815 CAS | 0063795 | 23/11/2014 | 2 | 23/11/2014 | ||||||
| Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 23/11/2014 | 3 | 621.3815 CAS | 0063796 | 05/03/2019 | 25/02/2019 | 3 | 23/11/2014 | ||||
| Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 02/07/2015 | 1 | 621.3815 CAS | 0065085 | 07/05/2019 | 18/04/2019 | 4 | 02/07/2015 | ||||
| Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 02/07/2015 | 621.3815 CAS | 0065086 | 02/07/2015 | 5 | 02/07/2015 | ||||||
| Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 22/11/2018 | 621.3815 CAS | 0068736 | 22/11/2018 | 6 | 22/11/2018 |