Handbook of semiconductor manufacturing technology /
Handbook of semiconductor manufacturing technology /
edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige.
- New York : Marcel Dekker, c2000.
- xiv, 1157 p. : ill. ; 29 cm.
Includes bibliographical references and index.
0824787838 (alk. paper)
Semiconductors--Design and construction--Handbooks, manuals, etc.
Semiconductor industry--Handbooks, manuals, etc.
621.38152
Includes bibliographical references and index.
0824787838 (alk. paper)
Semiconductors--Design and construction--Handbooks, manuals, etc.
Semiconductor industry--Handbooks, manuals, etc.
621.38152