Handbook of semiconductor manufacturing technology / edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige.
Material type: TextPublication details: New York : Marcel Dekker, c2000.Description: xiv, 1157 p. : ill. ; 29 cmISBN:- 0824787838 (alk. paper)
- 621.38152 22
Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | Central Library, SUST General Stacks | 621.38152 HAN (Browse shelf(Opens below)) | 1 | Available | 0049856 | |
Books | Central Library, SUST General Stacks | 621.38152 HAN (Browse shelf(Opens below)) | 2 | Available | 0049855 |
Includes bibliographical references and index.
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