Microlithography world
Microlithography world [electronic resource].
- Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, [1992]-2008.
- Quarterly, Jan./Feb./Mar. 1993-
- Vol. 1, no. 1 (Mar./Apr. 1992)- Ceased with v. 17, no. 4 (Nov. 2008).
Title from cover. Published: Tulsa, OK, Oct., Nov., Dec. 1993-
= Microlithography world
Semiconductors--Design and construction--Periodicals.
Microlithography--Periodicals.
Masks (Electronics)--Periodicals.
Masks (Electronics)
Microlithography.
Semiconductors--Design and construction.
Microlithografie.
Periodicals.
TK7871.85 / .M519
Title from cover. Published: Tulsa, OK, Oct., Nov., Dec. 1993-
= Microlithography world
Semiconductors--Design and construction--Periodicals.
Microlithography--Periodicals.
Masks (Electronics)--Periodicals.
Masks (Electronics)
Microlithography.
Semiconductors--Design and construction.
Microlithografie.
Periodicals.
TK7871.85 / .M519