Microlithography world (Record no. 79181)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01791cas a22004092a 4500 |
| 001 - CONTROL NUMBER | |
| control field | ebs576775e |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | BD-SySUS |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m d |||||| |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr|unu|||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 931011d19922008okuqr p o 0 a0eng c |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| Incorrect ISSN | 1074-407X |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (BD-SySUS)ebs576775e |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IXA |
| Language of cataloging | eng |
| Modifying agency | BD-SySUS |
| 042 ## - AUTHENTICATION CODE | |
| Authentication code | pcc nsdp |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | .M519 |
| 130 0# - MAIN ENTRY--UNIFORM TITLE | |
| Uniform title | Microlithography world (Online) |
| 9 (RLIN) | 46812 |
| 222 10 - KEY TITLE | |
| Key title | Microlithography world |
| 245 00 - TITLE STATEMENT | |
| Title | Microlithography world |
| Medium | [electronic resource]. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | Port Washington, N.Y. : |
| Name of publisher, distributor, etc. | Penn Well Publication, published in cooperation with SPIE, |
| Date of publication, distribution, etc. | [1992]-2008. |
| 310 ## - CURRENT PUBLICATION FREQUENCY | |
| Current publication frequency | Quarterly, |
| Date of current publication frequency | Jan./Feb./Mar. 1993- |
| 362 0# - DATES OF PUBLICATION AND/OR SEQUENTIAL DESIGNATION | |
| Dates of publication and/or sequential designation | Vol. 1, no. 1 (Mar./Apr. 1992)- |
| Dates of publication and/or sequential designation | Ceased with v. 17, no. 4 (Nov. 2008). |
| 500 ## - GENERAL NOTE | |
| General note | Title from cover. |
| General note | Published: Tulsa, OK, Oct., Nov., Dec. 1993- |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors |
| General subdivision | Design and construction |
| Form subdivision | Periodicals. |
| 9 (RLIN) | 46813 |
| Topical term or geographic name as entry element | Microlithography |
| Form subdivision | Periodicals. |
| 9 (RLIN) | 46814 |
| Topical term or geographic name as entry element | Masks (Electronics) |
| Form subdivision | Periodicals. |
| 9 (RLIN) | 46815 |
| Topical term or geographic name as entry element | Masks (Electronics) |
| Source of heading or term | fast |
| Authority record control number | (OCoLC)fst01011095 |
| 9 (RLIN) | 46816 |
| Topical term or geographic name as entry element | Microlithography. |
| Source of heading or term | fast |
| Authority record control number | (OCoLC)fst01019883 |
| 9 (RLIN) | 46817 |
| Topical term or geographic name as entry element | Semiconductors |
| General subdivision | Design and construction. |
| Source of heading or term | fast |
| Authority record control number | (OCoLC)fst01112213 |
| 9 (RLIN) | 15509 |
| Topical term or geographic name as entry element | Microlithografie. |
| Source of heading or term | gtt |
| 9 (RLIN) | 46818 |
| 655 #7 - INDEX TERM--GENRE/FORM | |
| Genre/form data or focus term | Periodicals. |
| Source of term | fast |
| Authority record control number | (OCoLC)fst01411641 |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Society of Photo-optical Instrumentation Engineers. |
| 9 (RLIN) | 15592 |
| 773 0# - HOST ITEM ENTRY | |
| Title | Academic Search Premier |
| Place, publisher, and date of publication | EBSCO |
| 776 1# - ADDITIONAL PHYSICAL FORM ENTRY | |
| Title | Microlithography world |
| International Standard Serial Number | 1074-407X |
| Record control number | (OCoLC)28982886 |
| -- | (DLC)93659127 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Full text available in SUST IP's: May 2003-Nov 2008. |
| Public note | Available in EBSCO Host Academic Search Premier. |
| Uniform Resource Identifier | <a href="https://search.ebscohost.com/direct.asp?db=aph&jid=9CK&scope=site">https://search.ebscohost.com/direct.asp?db=aph&jid=9CK&scope=site</a> |
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