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Microlithography : (Record no. 7082)

MARC details
000 -LEADER
fixed length control field 00665nam a2200193 a 4500
001 - CONTROL NUMBER
control field sulb2077
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 130317s1986 nyua b 001 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0070193045 :
Terms of availability $42.00
040 ## - CATALOGING SOURCE
Original cataloging agency DLC
Transcribing agency DLC
Modifying agency DLC
-- BD-SySUS
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38173
Edition number 22
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Elliott, David J.
245 10 - TITLE STATEMENT
Title Microlithography :
Remainder of title process technology for IC fabrication /
Statement of responsibility, etc. David J. Elliott.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New York :
Name of publisher, distributor, etc. McGraw-Hill,
Date of publication, distribution, etc. c1986.
300 ## - PHYSICAL DESCRIPTION
Extent xix, 378 p. :
Other physical details ill. ;
Dimensions 24 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographies and index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Very large scale integration
-- Design and construction.
Topical term or geographic name as entry element Microlithography.
Topical term or geographic name as entry element Photoresists.
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Copy number Price effective from Date last checked out
    Dewey Decimal Classification     Central Library, SUST Central Library, SUST General Stacks 17/03/2013   621.38173 ELM 0002077 17/03/2013 1 17/03/2013  
    Dewey Decimal Classification     Central Library, SUST Central Library, SUST General Stacks 20/03/2013   621.38173 ELM 0002076 20/03/2013 2 20/03/2013  
    Dewey Decimal Classification     Central Library, SUST Central Library, SUST General Stacks 20/03/2013 1 621.38173 ELM 0002078 10/08/2014 3 20/03/2013 17/07/2014
    Dewey Decimal Classification     Central Library, SUST Central Library, SUST General Stacks 20/03/2013   621.38173 ELM 0002074 20/03/2013 4 20/03/2013  
    Dewey Decimal Classification     Central Library, SUST Central Library, SUST General Stacks 01/05/2013   621.38173 ELM 0002075 01/05/2013 5 01/05/2013