Microlithography : (Record no. 7082)
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000 -LEADER | |
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fixed length control field | 00665nam a2200193 a 4500 |
001 - CONTROL NUMBER | |
control field | sulb2077 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 130317s1986 nyua b 001 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0070193045 : |
Terms of availability | $42.00 |
040 ## - CATALOGING SOURCE | |
Original cataloging agency | DLC |
Transcribing agency | DLC |
Modifying agency | DLC |
-- | BD-SySUS |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.38173 |
Edition number | 22 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Elliott, David J. |
245 10 - TITLE STATEMENT | |
Title | Microlithography : |
Remainder of title | process technology for IC fabrication / |
Statement of responsibility, etc. | David J. Elliott. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc. | New York : |
Name of publisher, distributor, etc. | McGraw-Hill, |
Date of publication, distribution, etc. | c1986. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xix, 378 p. : |
Other physical details | ill. ; |
Dimensions | 24 cm. |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc | Includes bibliographies and index. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Integrated circuits |
General subdivision | Very large scale integration |
-- | Design and construction. |
Topical term or geographic name as entry element | Microlithography. |
Topical term or geographic name as entry element | Photoresists. |
Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Date last checked out |
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Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 17/03/2013 | 621.38173 ELM | 0002077 | 17/03/2013 | 1 | 17/03/2013 | ||||||
Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 20/03/2013 | 621.38173 ELM | 0002076 | 20/03/2013 | 2 | 20/03/2013 | ||||||
Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 20/03/2013 | 1 | 621.38173 ELM | 0002078 | 10/08/2014 | 3 | 20/03/2013 | 17/07/2014 | ||||
Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 20/03/2013 | 621.38173 ELM | 0002074 | 20/03/2013 | 4 | 20/03/2013 | ||||||
Dewey Decimal Classification | Central Library, SUST | Central Library, SUST | General Stacks | 01/05/2013 | 621.38173 ELM | 0002075 | 01/05/2013 | 5 | 01/05/2013 |