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MEMS [electronic resource] : fundamental technology and applications / editors, Vikas Choudhary, Krzysztof Iniewski.

Contributor(s): Material type: TextTextSeries: Publication details: Boca Raton : Taylor & Francis, 2013.Description: xxii, 456 p. : illISBN:
  • 9781466515826 (ebook : PDF)
Subject(s): Online resources:
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Includes bibliographical references and index.

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