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	1.	Microlithography : process technology for IC fabrication / David J. Elliott. by Elliott, David J Material type: Text; Format: print ; Literary form: Not fiction Publication details: New York : McGraw-Hill, c1986 Availability: Items available for loan: Central Library, SUST (5)Call number: 621.38173 ELM, ... Place hold Add to cart (remove)
	2.	No cover image available No cover image available Microlithography world [electronic resource]. by Society of Photo-optical Instrumentation Engineers Source: Academic Search Premier Material type: Continuing resource; Format: available online ; Type of continuing resource: periodical Publication details: Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, [1992]-2008 Online access: Full text available in SUST IP's: May 2003-Nov 2008. Available in EBSCO Host Academic Search Premier. Availability: No items available. Add to cart (remove)

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