Fundamentals of semiconductor manufacturing and process control /
May, Gary S.
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006. - xix, 463 p. : ill. ; 25 cm.
Includes bibliographical references and index.
0471784060 (cloth : alk. paper) 9780471784067
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
Process control--Statistical methods.
621.38152 / MAF
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006. - xix, 463 p. : ill. ; 25 cm.
Includes bibliographical references and index.
0471784060 (cloth : alk. paper) 9780471784067
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
Process control--Statistical methods.
621.38152 / MAF