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Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

By: Contributor(s): Material type: TextTextPublication details: [Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, c2006.Description: xix, 463 p. : ill. ; 25 cmISBN:
  • 0471784060 (cloth : alk. paper)
  • 9780471784067
Subject(s): DDC classification:
  • 621.38152 22 MAF
Online resources:
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Books Books Library, Institute of Information and Communication Technology General Stacks 621.38152 MAF (Browse shelf(Opens below)) 1 Available I000154
Books Books Library, Institute of Information and Communication Technology General Stacks 621.38152 MAF (Browse shelf(Opens below)) 2 Available I000153

Includes bibliographical references and index.

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