MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01270nam a22002897a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
sulbI000154 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
BD-SySUS |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20160525100547.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160525s2006 njua b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471784060 (cloth : alk. paper) |
|
|---|
| International Standard Book Number |
9780471784067 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
UKM |
| -- |
BAKER |
| -- |
C#P |
| -- |
COO |
| -- |
DLC |
| -- |
BD-SySUS |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Edition number |
22 |
| Item number |
MAF |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
May, Gary S. |
| 9 (RLIN) |
25721 |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Fundamentals of semiconductor manufacturing and process control / |
| Statement of responsibility, etc. |
Gary S. May, Costas J. Spanos. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc. |
[Piscataway] : |
| Name of publisher, distributor, etc. |
IEEE ; |
| Place of publication, distribution, etc. |
Hoboken, N.J. : |
| Name of publisher, distributor, etc. |
Wiley-Interscience, |
| Date of publication, distribution, etc. |
c2006. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xix, 463 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors |
| General subdivision |
Design and construction. |
| 9 (RLIN) |
15509 |
|
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| General subdivision |
Design and construction. |
| 9 (RLIN) |
15508 |
|
|---|
| Topical term or geographic name as entry element |
Process control |
| General subdivision |
Statistical methods. |
| 9 (RLIN) |
11544 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Spanos, Costas J. |
| 9 (RLIN) |
25722 |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/ecip061/2005028448.html">http://www.loc.gov/catdir/toc/ecip061/2005028448.html</a> |
|
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html">http://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html</a> |
|
|---|
| Materials specified |
Contributor biographical information |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html">http://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Books |
