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Microlithography : process technology for IC fabrication / David J. Elliott.

By: Material type: TextTextPublication details: New York : McGraw-Hill, c1986.Description: xix, 378 p. : ill. ; 24 cmISBN:
  • 0070193045 :
Subject(s): DDC classification:
  • 621.38173 22
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Item type Current library Call number Copy number Status Date due Barcode
Books Books Central Library, SUST General Stacks 621.38173 ELM (Browse shelf(Opens below)) 1 Available 0002077
Books Books Central Library, SUST General Stacks 621.38173 ELM (Browse shelf(Opens below)) 2 Available 0002076
Books Books Central Library, SUST General Stacks 621.38173 ELM (Browse shelf(Opens below)) 3 Available 0002078
Books Books Central Library, SUST General Stacks 621.38173 ELM (Browse shelf(Opens below)) 4 Available 0002074
Books Books Central Library, SUST General Stacks 621.38173 ELM (Browse shelf(Opens below)) 5 Available 0002075
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621.38173 ELM Microlithography : 621.38173 ELM Microlithography : 621.38173 ELM Microlithography : 621.38173 ELM Microlithography : 621.38173 GAT Gate arrays : 621.38173 GAT Gate arrays : 621.38173 GAT Gate arrays :

Includes bibliographies and index.

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