Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.
Material type: TextPublication details: [Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, c2006.Description: xix, 463 p. : ill. ; 25 cmISBN:- 0471784060 (cloth : alk. paper)
- 9780471784067
- 621.38152 22 MAF
Item type | Current library | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | Library, Institute of Information and Communication Technology General Stacks | 621.38152 MAF (Browse shelf(Opens below)) | 1 | Available | I000154 | |
Books | Library, Institute of Information and Communication Technology General Stacks | 621.38152 MAF (Browse shelf(Opens below)) | 2 | Available | I000153 |
Includes bibliographical references and index.
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